Abstract: [Objectives] To evaluate the effects of profile variability on the aerodynamic performance of compressor and to provide guidance for the robust design of compressor blade, [Methods] a mathematical model of profile variability distribution with single peak is established. The effects of combined profile variability on blade pressure and suction surfaces on the aerodynamic performance of supersonic planar cascades are investigated by numerical simulation. [Results] The results show that the profile variability distribution on suction surface is the key factor for cascade total pressure loss. The total pressure loss coefficient decreases gradually with the position of maximum profile variability on suction surface moving downstream. The profile variability distributions on blade pressure and suction surfaces influence the flow turning angle and static pressure rise coefficient with opposite trends. The profile variability on suction surface plays a dominant role in flow turning angle and static pressure rise for the cascade with lower incoming Mach number; For the cascade with higher incoming Mach number, the profile variability on pressure surface have a significant impact on flow turning angle and static pressure rise. The position and intensity of shock wave and the end wall profile of expansion channel after shock wave comprehensively determine the flow state on the blade surface and in the cascade blade passage. The flow loss near blade suction surface increases and the flow loss near blade pressure surface decreases, the compound effect determines the change of cascade loss, flow turning angle and static pressure rise. [Conclusions] The results can provide guidances for transonic compressor design, manufacture and review of manufacturing variability.